Maintains
sealing force to keep seals tight
Kalrez
outperforms other elastomers when it comes to sealing force
retention, a measure of seal life. Even under harsh and
aggressive conditions, Kalrez will retain its sealing force
longer. And thanks to its true-rubber resiliency, Kalrez
prevents leaks caused by creep, a major problem with PTFE.
parts
exhibit low compression set
maintaining
their elastic recovery to maintain tight seals over the long
haul. Because Kalrez parts recover better under compression
than other perfluoroelastomers, they maintain their shape
better under prolonged stress. In addition to providing
superior chemical resistance and thermal stability,
Kalrez Ultra Pure parts, designed specifically for
semiconductor applications, offer lower contamination in
reactive plasmas and cleaning gases, improved vacuum-sealing
performance and lower out gassing. In addition, Kalrez Ultra
Pure parts are manufactured under clean-cell conditions and
specially cleaned and double packaged at Class 100
workstations. Kalrez provides long-term reliability in
plasma, gas deposition, thermal and wet processing
applications, such as:
Etching,
ashing, HDPCVD, PECVD
Diffusion,
LPCVD, RTP, lamp annealing
Wet
etching, cleaning, photoresist stripping, copper plating
Kalrez
parts specifically developed for the semiconductor industry
are available in standard O-ring sizes as well as metric and
JIS O-ring sizes.
Sheet stock and custom geometries are available for
die-cut gaskets or custom development.
Kalrez parts
are field proven in demanding applications |